# Profile Smoothing is Disabled
#			total	Na+	K+	Mg+	Li_2S+	Li_2Cl+	Ca+	Li_2O+	Li_2OH+	Li+	^6Li+	Li_5O_2+	Li_3+	Li_3O+	Li_3H_2+	C_2H_5+	LiOH+	Si+	
#			N/A	22,9895	38,9648	23,9841	46,0051	48,9999	39,9639	30,0256	31,0345	7,0185	6,0170	67,0702	21,0477	37,0429	23,0637	29,0391	24,0175	27,9751	
#Data Point #	Sputter Time (s)	Fluence (ions/cm^2)	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	Intensity	
1	0	7,09455e+10	18066,6	3,0019	0	0	0	51,5555	0	116,928	403,575	13572,6	2814,86	3,0057	1,00021	37,3864	0	33,5503	8,0135	4,00337	
2	1,33	2,03374e+15	23377,7	2,00084	0	0	0	311,572	0	427,221	1959,49	13966,8	4547,7	3,0019	2,00084	175,622	0	1,03689	38,3073	0	
3	2,66	4,0671e+15	23436,2	6,00759	0	1,00021	2,00084	348,499	0	405,957	1957,81	13991,1	4534,16	2,00084	1,00021	186,268	0	2,08196	38,3201	0	
4	3,99	6,10017e+15	24350,7	5,00527	0	0	4,00337	408,144	0	442,834	1962,94	14838	4507,33	2,00084	1,00021	188,731	0	0	41,358	4,00337	
5	5,32	8,13295e+15	23609,6	1,00021	0	0	0	371,614	0	517,742	1983,77	13808,3	4554,49	4,00337	2,00084	255,922	0	1,04741	39,3238	5,00527	
6	6,65	1,01654e+16	23638,8	2,00084	0	0	1,00063	331,035	0	590,737	1749,61	13997,6	4435,05	6,00759	5,00527	383,375	0	1,05065	34,2457	4,00337	
7	7,98	1,21976e+16	23525	3,0019	0	0	4,00337	269,756	0	701,321	1477,96	13930,4	4474,2	9,0171	2,00084	490,204	0	0	15,0476	2,00084	
8	9,31	1,42295e+16	23043,8	2,00084	1,00021	0	0	189,352	0	711,982	1010,51	14059,9	4453,55	13,0357	6,00759	577,22	0	0	14,0414	1,00021	
9	10,64	1,62611e+16	21228,3	2,00084	0	0	1,00021	119,98	0	653,104	675,591	13633,5	3816,42	11,0256	4,00337	579,5	0	0	8,0135	0	
10	11,97	1,82923e+16	19191,7	1,00021	0	0	2,00084	73,1139	0	497,686	434,615	13634,9	2718,69	9,0209	9,0171	466,489	0	0	5,00527	1,00021	
11	13,3	2,03233e+16	13158,7	0	1,00021	0	1,00021	25,1325	0	260,81	216,582	10156,1	1356,51	7,01034	3,0019	291,398	0	1,01866	1,00021	0	
12	14,63	2,2354e+16	6323,16	0	0	0	0	14,0414	0	114,727	102,166	4553,49	764,968	3,0019	9,0171	200,206	0	0	1,00021	0	
13	15,96	2,43844e+16	4134,25	1,00021	0	0	0	13,0357	0	75,1774	48,4917	3016,16	469,492	5,00738	4,00337	116,928	0	0	1,00021	1,00021	
14	17,29	2,64145e+16	3100,74	1,00021	0	0	0	8,0135	2,00084	45,4511	31,2041	2278,36	340,249	6,00759	4,00337	84,485	0	0	0	0	
15	18,62	2,84443e+16	2557,12	0	0	0	0	0	0	30,1911	15,0476	2014,33	226,462	4,00337	7,01034	50,5338	0	0	0	0	
16	19,95	3,04738e+16	2164,03	4,00337	1,00021	0	0	2,00084	0	12,0304	5,00527	1732,78	168,863	0	4,00337	47,4915	0	0	0	0	
17	21,28	3,2503e+16	1930,62	3,0019	0	0	0	0	0	9,0209	3,0019	1526,3	171,012	0	4,00337	40,3407	0	0	0	0	
18	22,61	3,45319e+16	1768,23	3,0019	0	0	0	0	0	16,0609	1,00021	1443,08	133,693	8,0135	1,00021	34,2457	0	0	0	0	
19	23,94	3,65605e+16	1543,5	4,00337	0	0	1,00021	0	0	13,0412	4,00337	1256,94	107,392	3,0019	2,00084	25,1325	0	0	0	0	
20	25,27	3,85888e+16	1420,72	3,0019	0	0	0	0	0	8,01688	0	1131,31	109,485	1,00021	3,0019	32,2175	0	0	0	0	
21	26,6	4,06168e+16	1497,97	9,0171	0	0	0	0	0	6,00759	1,00021	1213,21	116,827	2,00084	3,0019	26,1434	0	0	0	0	
22	27,93	4,26445e+16	1520,42	6,00759	2,00084	0	0	0	0	2,00169	0	1216,55	146,422	2,00084	2,00084	30,2026	0	0	0	0	
23	29,26	4,46719e+16	1560,84	2,00084	0	1,00021	1,00021	0	0	8,01688	1,00021	1251,86	135,81	2,00084	2,00084	31,2041	0	0	0	0	
24	30,59	4,6699e+16	1523,26	6,00759	0	0	0	0	0	3,0019	3,0019	1250,16	100,079	2,00084	6,00759	31,2041	0	0	0	1,00021	
25	31,92	4,87258e+16	1510,93	5,00527	0	0	0	0	1,00021	8,0135	1,00021	1204,89	123,138	5,00527	1,00021	36,2756	0	0	0	0	
26	33,25	5,07523e+16	1611,48	3,0019	0	0	0	0	0	13,0357	2,00084	1305,69	133,693	3,0019	2,00084	26,1434	0	0	0	0	
27	34,58	5,27785e+16	1631,19	3,0019	0	0	0	0	0	5,00527	1,00021	1311,9	131,578	1,00021	4,00337	43,394	0	0	0	0	
28	35,91	5,48044e+16	1751,06	2,00084	0	0	0	0	0	8,01688	2,00084	1435,55	133,693	1,00021	4,00337	31,2041	0	0	0	0	
29	37,24	5,68301e+16	1645,04	1,00021	1,00021	0	0	0	0	9,0171	1,00021	1325,84	123,138	1,00021	4,00337	42,3758	0	0	0	0	
30	38,57	5,88554e+16	1632,45	6,00759	0	0	0	0	0	13,0357	0	1334,59	122,085	4,00337	1,00021	34,2457	0	0	0	0	
31	39,9	6,08804e+16	1610,13	1,00021	0	0	0	0	0	12,0304	2,00084	1280,83	142,172	2,00084	1,00021	34,2602	0	0	0	0	
32	41,23	6,29051e+16	1643,09	6,00759	1,00021	0	0	0	0	8,0135	2,00084	1306,69	126,299	1,00021	2,00084	37,2912	0	0	0	0	
33	42,56	6,49296e+16	1652,38	2,00084	0	0	0	0	0	10,0211	1,00021	1341,62	122,085	0	4,00337	35,2904	0	0	0	0	
34	43,89	6,69537e+16	1799,86	1,00021	0	0	0	0	0	7,01034	0	1475,51	134,751	3,0019	3,0019	34,2457	0	0	0	0	
35	45,22	6,89775e+16	1775,63	2,00084	1,00021	0	0	0	0	7,01034	0	1424,78	162,501	2,00084	5,00527	41,358	1,00021	0	0	0	
36	46,55	7,10011e+16	1790,54	2,00084	0	0	0	0	0	11,0256	5,00527	1471,79	145,359	2,00169	1,00021	39,3238	0	0	0	0	
37	47,88	7,30243e+16	1894,73	2,00084	0	0	0	0	0	11,0256	4,00337	1562,71	129,465	2,00084	8,0135	25,1325	0	0	0	0	
38	49,21	7,50472e+16	1959,85	1,00021	0	0	0	0	0	4,00506	3,0019	1616,4	153,879	0	4,00337	41,3756	0	0	0	0	
39	50,54	7,70699e+16	1981,01	2,00084	0	0	0	0	0	7,01034	1,00021	1631,27	151,746	1,00021	4,00337	35,2605	1,00021	0	0	0	
40	51,87	7,90922e+16	2035,09	1,00021	0	0	0	0	0	8,01688	1,00021	1691,66	153,879	2,00084	2,00084	35,2754	0	0	0	0	
41	53,2	8,11143e+16	2028,09	3,0019	1,00021	0	0	0	0	15,0476	1,00021	1666,32	156,014	2,00084	5,00527	41,358	0	0	0	0	
42	54,53	8,3136e+16	2011,77	1,00021	0	0	0	0	0	9,0171	0	1659,26	168,863	1,00021	2,00084	31,2041	1,00021	0	0	0	
43	55,86	8,51575e+16	2277,66	6,00759	1,00021	0	0	0	0	11,0256	1,00021	1855,24	187,187	2,00084	2,00084	38,339	1,00021	0	0	0	
44	57,19	8,71786e+16	2324,84	2,00084	0	0	0	0	0	19,0845	3,0019	1886,03	205,652	3,0019	4,00337	40,3407	0	0	0	0	
45	58,52	8,91995e+16	2401,9	1,00021	0	0	0	0	0	8,0135	5,00527	1931,72	211,111	6,00759	1,00021	48,4917	2,00084	0	0	0	
46	59,85	9,122e+16	2314,47	1,00021	0	0	0	0	0	10,0211	0	1898,12	191,519	1,00021	1,00021	40,3407	1,00021	0	0	0	
47	61,18	9,32403e+16	2662,8	3,0019	0	0	0	0	0	14,0414	1,00021	2158,75	229,764	1,00021	2,00084	48,5123	1,00021	0	0	0	
48	62,51	9,52602e+16	2510,09	0	0	0	0	0	0	5,00527	3,0019	2097,51	191,603	1,00021	1,00021	44,4127	0	0	0	0	
49	63,84	9,72799e+16	2481,84	0	0	1,00021	0	0	0	8,01688	4,00337	2052	194,773	2,00084	1,00021	46,4904	0	0	0	0	
50	65,17	9,92992e+16	2555,39	1,00021	0	0	0	0	0	12,0304	3,0019	2109,63	198,031	3,0019	3,0019	38,3235	1,00021	0	0	0	
51	66,5	1,01318e+17	2555,98	2,00084	0	0	0	0	0	10,0211	2,00084	2075,84	207,834	3,0019	8,0135	49,5125	0	1,0019	0	0	
